Static current-voltage characteristics of Au/CaF2/n-Si(111) MIS tunneling structures

被引:13
作者
Suturin, S. M. [1 ]
Banshchikov, A. G. [1 ]
Sokolov, N. S. [1 ]
Tyaginov, S. E. [1 ]
Vexler, M. I. [1 ]
机构
[1] Russian Acad Sci, AF Ioffe Physicotech Inst, St Petersburg 194021, Russia
基金
俄罗斯基础研究基金会;
关键词
D O I
10.1134/S1063782608110110
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Using molecular-beam epitaxy, Au/CaF2/n-Si(111) structures were fabricated that exhibit lower currents at a given fluoride film thickness (1.5-2 nm) than those of all similar structures studied. At a positive voltage at the metal, the current is in agreement with that calculated within the model with conservation of the transverse component of the wave vector during tunneling transport. Relative contributions of electron and hole components were analyzed for forward and reverse biases. The effect of the nonuniform distribution of the insulator thickness over the area on measured currents was estimated. The thin CaF2 layers that were grown are potentially applicable as barrier layers in various devices of functional electronics.
引用
收藏
页码:1304 / 1308
页数:5
相关论文
共 18 条
[1]  
Alvarez JC, 1996, SEMICONDUCTORS+, V30, P698
[2]   SCANNING TUNNELING MICROSCOPY OF INSULATORS - CAF2 EPITAXY ON SI(111) [J].
AVOURIS, P ;
WOLKOW, R .
APPLIED PHYSICS LETTERS, 1989, 55 (11) :1074-1076
[3]   Analysis of charge transport in a polycrystalline pentacene thin film transistor by temperature and gate bias dependent mobility and conductance [J].
Guo, Dong ;
Miyadera, Tetsuhiko ;
Ikeda, Susumu ;
Shimada, Toshihiro ;
Saiki, Koichiro .
JOURNAL OF APPLIED PHYSICS, 2007, 102 (02)
[4]  
Hayes W., 1974, CRYSTALS FLUORITE ST
[5]   LOW-TEMPERATURE SURFACE CLEANING OF SILICON AND ITS APPLICATION TO SILICON MBE [J].
ISHIZAKA, A ;
SHIRAKI, Y .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (04) :666-671
[6]   Structural and luminescence studies of CdF2-CaF2 superlattices on Si(111) [J].
Khilko, AY ;
Gastev, SV ;
Kyutt, RN ;
Zamoryanskaya, MV ;
Sokolov, NS .
APPLIED SURFACE SCIENCE, 1998, 123 :595-598
[7]   OPTICALLY INDUCED BISTABLE STATES IN METAL-TUNNEL-OXIDE-SEMICONDUCTOR (MTOS) JUNCTIONS [J].
LAI, SK ;
DRESSENDORFER, PV ;
MA, TP ;
BARKER, RC .
APPLIED PHYSICS LETTERS, 1981, 38 (01) :41-44
[8]   Modeling and simulation of tunneling through ultra-thin gate dielectrics [J].
Schenk, A ;
Heiser, G .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (12) :7900-7908
[9]  
Schew William A., 1998, Oxford Ornithology Series, V8, P288
[10]   Low-leakage MIS structures with 1.5-6 nm CaF2 insulating layer on Si(111) [J].
Sokolov, N. S. ;
Grekhov, I. V. ;
Ikeda, S. ;
Kaveev, A. K. ;
Krupin, A. V. ;
Saiki, K. ;
Tsutsui, K. ;
Tyaginov, S. E. ;
Vexler, M. I. .
MICROELECTRONIC ENGINEERING, 2007, 84 (9-10) :2247-2250