Two step floating catalyst chemical vapor deposition including in situ fabrication of catalyst nanoparticles and carbon nanotube forest growth with low impurity level

被引：30

作者：

Kinoshita, Toshiya ^{[1
]}

Karita, Motoyuki ^{[2
]}

Nakano, Takayuki ^{[2
]}

Inoue, Yoku ^{[2
]}

机构：

[1] Shizuoka Univ, Grad Sch Sci & Technol, Naka Ku, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328561, Japan

[2] Shizuoka Univ, Dept Elect & Mat Sci, Naka Ku, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328561, Japan

来源：

CARBON | 2019年 / 144卷

基金：

日本科学技术振兴机构;

关键词：

MECHANICAL-PROPERTIES; YARNS; IRON; XPS; ARRAYS; ELECTRODES; PARTICLES; DIAMETER; DYNAMICS; SENSOR;

D O I：

10.1016/j.carbon.2018.12.019

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Carbon nanotube (CNT) forest with very low concentration of metallic impurity particle was grown by a two-step floating-catalyst chemical vapor deposition (CVD) method. Fe catalyst nanoparticles were uniformly formed on the substrate by flowing ferrocene/ethanol mist generated by an ultrasonic nebulizer. Then, the growth of the CNT forest was followed by a thermal CVD process in an identical furnace with acetylene as a carbon source. The separated process of catalyst formation and CNT growth leads to no formation of impurity particles on the CNT surfaces with a lower impurity level of 0.8 wt%. The gas-phase flow of the catalyst solution enables precise control of catalyst formation including diameter, radius of curvature and areal density of catalyst particle for long and dense CNT forest. The CNT forest grown under optimum conditions had a spin capability because of its high areal density greater than 1 x 10(11) cm(-2). (C) 2018 Elsevier Ltd. All rights reserved.

引用

页码：152 / 160

页数：9

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