A new approach to fabricating high density nanoarrays by nanocontact printing

被引：14

作者：

Gu, Jian ^{[1
]}

Xiao, Xiaoyin ^{[2
]}

Takulapalli, Bharath R. ^{[1
]}

Morrison, Michael E. ^{[2
]}

Zhang, Peiming ^{[2
]}

Zenhausern, Frederic ^{[1
,3
]}

机构：

[1] Arizona State Univ, Ctr Appl NanoBiosci, Tempe, AZ 85287 USA

[2] Arizona State Univ, Biodesign Inst, Ctr Single Mol Biophys, Tempe, AZ 85287 USA

[3] Arizona State Univ, Ira A Fulton Sch Engn, Tempe, AZ 85287 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2008年 / 26卷 / 06期

关键词：

atomic force microscopy; DNA; molecular biophysics; nanobiotechnology; nanocontacts; nanolithography; proteins; soft lithography; ultraviolet lithography;

D O I：

10.1116/1.2998754

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The authors introduce a new scheme of nanocontact printing that fabricates nanoarrays using stamps generated by ultraviolet nanoimprint lithography. Array patterns can be generated by this printing technique in a high density (number of features per unit area) fashion with a feature size as low as 30 nm and period of 100 nm. Sub-500 nm alignment accuracy for multilayer printing has been obtained using a traditional contact mask aligner. They also demonstrate that they can image a nanoarray labeled by streptavidin by atomic force microscope.

引用

页码：1860 / 1865

页数：6

共 39 条

[1] A simple approach to sensor discovery and fabrication on self-assembled monolayers on glass [J].

Basabe-Desmonts, L ;

Beld, J ;

Zimmerman, RS ;

Hernando, J ;

Mela, P ;

García-Parajó, MF ;

van Hulst, NF ;

van den Berg, A ;

Reinhoudt, DN ;

Crego-Calama, M .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2004, 126 (23) :7293-7299

[2] Two-step formation of streptavidin-supported lipid bilayers by PEG-triggered vesicle fusion. Fluorescence and atomic force microscopy characterization [J].

Berquand, A ;

Mazeran, PE ;

Pantigny, J ;

Proux-Delrouyre, V ;

Laval, JM ;

Bourdillon, C .

LANGMUIR, 2003, 19 (05) :1700-1707

[3] Patterning organic single-crystal transistor arrays [J].

Briseno, Alejandro L. ;

Mannsfeld, Stefan C. B. ;

Ling, Mang M. ;

Liu, Shuhong ;

Tseng, Ricky J. ;

Reese, Colin ;

Roberts, Mark E. ;

Yang, Yang ;

Wudl, Fred ;

Bao, Zhenan .

NATURE, 2006, 444 (7121) :913-917

[4] Large area submicrometer contact printing using a contact aligner [J].

Burgin, T ;

Choong, VE ;

Maracas, G .

LANGMUIR, 2000, 16 (12) :5371-5375

[5] Geometric control of cell life and death [J].

Chen, CS ;

Mrksich, M ;

Huang, S ;

Whitesides, GM ;

Ingber, DE .

SCIENCE, 1997, 276 (5317) :1425-1428

[6] Room-temperature, low-pressure nanoimprinting based on cationic photopolymerization of novel epoxysilicone monomers [J].

Cheng, X ;

Guo, LJ ;

Fu, PF .

ADVANCED MATERIALS, 2005, 17 (11) :1419-+

[7] Characterization and modeling of volumetric and mechanical properties for step and flash imprint lithography photopolymers [J].

Colburn, M ;

Suez, I ;

Choi, BJ ;

Meissl, M ;

Bailey, T ;

Sreenivasan, SV ;

Ekerdt, JG ;

Willson, CG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (06) :2685-2689

[8] Microcontact printing using poly(dimethylsiloxane) stamps hydrophilized by poly(ethylene oxide) silanes [J].

Delamarche, E ;

Donzel, C ;

Kamounah, FS ;

Wolf, H ;

Geissler, M ;

Stutz, R ;

Schmidt-Winkel, P ;

Michel, B ;

Mathieu, HJ ;

Schaumburg, K .

LANGMUIR, 2003, 19 (21) :8749-8758

[9] CONTACT ADHESION OF THIN GOLD-FILMS ON ELASTOMERIC SUPPORTS - COLD WELDING UNDER AMBIENT CONDITIONS [J].

FERGUSON, GS ;

CHAUDHURY, MK ;

SIGAL, GB ;

WHITESIDES, GM .

SCIENCE, 1991, 253 (5021) :776-778

[10] Air cushion press for excellent uniformity, high yield, and fast nanoimprint across a 100 mm field [J].

Gao, He ;

Tan, Hua ;

Zhang, Wei ;

Morton, Keith ;

Chou, Stephen Y. .

NANO LETTERS, 2006, 6 (11) :2438-2441

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