Scanning capacitance microscopy profiles semiconductor carriers

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EE-EVALUATION ENGINEERING | 1997年 / 36卷 / 04期
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The scanning capacitance microscope (SCM) may not be a household term, but it is gaining followers in the inspection industry. Semiconductor manufacturers are discovering that this tool can help bring previously obscure images into sharp focus.
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页码:24 / &
页数:4
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