Scanning capacitance microscopy profiles semiconductor carriers

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作者：
不详
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来源：
EE-EVALUATION ENGINEERING | 1997年 / 36卷 / 04期
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The scanning capacitance microscope (SCM) may not be a household term, but it is gaining followers in the inspection industry. Semiconductor manufacturers are discovering that this tool can help bring previously obscure images into sharp focus.
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页码：24 / &
页数：4
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