CMOS-MEMS resonant mixer-filters

RF mixer-filters made by micromachining composite metal and dielectric interconnect layers within foundry CMOS are a potential component in on-chip receivers. Through the electrostatic voltage-squared nonlinearity, mixer-filters down-convert to an intermodulation frequency set by the mechanical resonance enabling higher gain than resonant filters having a RF signal output. The research is leading toward resonant mixer-filters integrated with preamplifiers and having 0 dB insertion gain with sub-mW power.