Quantification for 3D micro X-ray fluorescence

被引:45
作者
Mantouvalou, Ioanna [1 ]
Malzer, Wolfgang [1 ]
Kanngiesser, Birgit [1 ]
机构
[1] Tech Univ Berlin, Inst Opt & Atom Phys, D-10623 Berlin, Germany
关键词
Quantification for 3D Micro-XRF; Confocal setup; Depth profiling; Probing site selection; 3D mapping; XRF; RECONSTRUCTION; SPECIATION; OBJECTS;
D O I
10.1016/j.sab.2012.08.002
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
3D micro X-ray fluorescence analysis (3D Micro-XRF) is a non-destructive method for the investigation of elemental compositions of specimens with which three-dimensionally resolved information can be obtained. This is rendered possible through the formation of a probing volume resulting from the overlap of a condensed X-ray beam and the acceptance of a polycapillary lens in front of an energy-dispersive detector. Various setup schemes have been developed in the last years, which can be divided into synchrotron instrumentation and X-ray tube based spectrometers. Established in 2003/2004 numerous applications have been published up until now. Quantification of data though is still a topic of considerable interest and has been reported only for limited number of publications. This review aims to give an overview of work on quantitative 3D Micro-XRF. As the method can be applied with adapted setups to a variety of analytical problems, quantification also has to be flexible and different schemes have been developed. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:9 / 18
页数:10
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