Quantification for 3D micro X-ray fluorescence

被引：45

作者：

Mantouvalou, Ioanna ^{[1
]}

Malzer, Wolfgang ^{[1
]}

Kanngiesser, Birgit ^{[1
]}

机构：

[1] Tech Univ Berlin, Inst Opt & Atom Phys, D-10623 Berlin, Germany

来源：

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY | 2012年 / 77卷

关键词：

Quantification for 3D Micro-XRF; Confocal setup; Depth profiling; Probing site selection; 3D mapping; XRF; RECONSTRUCTION; SPECIATION; OBJECTS;

D O I：

10.1016/j.sab.2012.08.002

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

3D micro X-ray fluorescence analysis (3D Micro-XRF) is a non-destructive method for the investigation of elemental compositions of specimens with which three-dimensionally resolved information can be obtained. This is rendered possible through the formation of a probing volume resulting from the overlap of a condensed X-ray beam and the acceptance of a polycapillary lens in front of an energy-dispersive detector. Various setup schemes have been developed in the last years, which can be divided into synchrotron instrumentation and X-ray tube based spectrometers. Established in 2003/2004 numerous applications have been published up until now. Quantification of data though is still a topic of considerable interest and has been reported only for limited number of publications. This review aims to give an overview of work on quantitative 3D Micro-XRF. As the method can be applied with adapted setups to a variety of analytical problems, quantification also has to be flexible and different schemes have been developed. (C) 2012 Elsevier B.V. All rights reserved.

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页码：9 / 18

页数：10

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