Ni Barrier Symmetry Effect on Electromigration Failure Mechanism of Cu/Sn-Ag Microbump

Ni barrier symmetry effect on the electromigration (EM) failure mechanism of Cu/Sn-Ag microbump were systematically investigated by studying the intermetallic compound (IMC) growth characteristics at 150 degrees C with a current density of 1.5x10(5)A/cm(2). In the symmetric Ni barrier structure, Cu diffusion to Sn-Ag solder was restricted by the Ni barrier at both interfaces and the Ni3Sn4 phase formed by the inter-diffusion between Ni and Sn atoms just after bonding, which was gradually transformed to (Ni,Cu)(3)Sn-4 phase and later to (Cu,Ni)(6)Sn-5 during current stressing with relatively slow resistance increase with time. By the way, in the asymmetric structure, extensive Cu6Sn5 phase grew by the inter-diffusion between Cu and Sn atoms due to there is no Ni barrier at the upper interface, which was rapidly transformed into only Cu6Sn5 and Cu3Sn IMCs during electron downward flow, with relatively fast resistance increase with time. Therefore, the symmetric Ni barrier structure is very effective in restricting extensive IMC reactions during EM of Cu-solder microbump structure. [GRAPHICS]