Fast and High-Precision 3D Tracking and Position Measurement with MEMS Micromirrors

被引：8
|
作者：
Milanovic, Veljko [1 ]
Lo, Wing Kin [1 ]
机构：
[1] Mirrorcle Technol Inc, Albany, CA 94706 USA
来源：
2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2008年
关键词：
D O I：
10.1109/OMEMS.2008.4607834
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We demonstrate real-time fast-motion tracking of an object in a 3D volume, while obtaining its precise XYZ co-ordinates. Two separate scanning MEMS micromirror sub-systems track the object in a 20 kHz closed-loop. A demonstration system capable of tracking fall-speed human hand motion provides position information at up to 5m distance with 16-bit precision, or double left arrow 20 mu m precision on the X and Y axes (up/down, left/right,) and precision on the depth (Z-axis) from 10 mu m to 1.5mm, depending on distance.
引用
收藏
页码：72 / 73
页数：2
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