CuO Nanowire-Based Humidity Sensor

被引：43

作者：

Wang, Sheng-Bo ^{[1
]}

Hsiao, Chih-Hung ^{[1
]}

Chang, Shoou-Jinn ^{[1
]}

Lam, Kin-Tak ^{[2
]}

Wen, Kuo-Hsun ^{[2
]}

Young, Sheng-Joue ^{[3
]}

Hung, Shang-Chao ^{[4
]}

Huang, Bohr-Ran ^{[5
]}

机构：

[1] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Dept Elect Engn, Inst Microelect,Ctr Micro Nano Sci & Technol, Tainan 70101, Taiwan

[2] Fuzhou Univ, Coll Phys & Informat Engn, Fujien 350108, Peoples R China

[3] Natl Formosa Univ, Dept Elect Engn, Huwei Township 632, Yunlin, Taiwan

[4] Shih Chien Univ, Dept Informat Technol & Commun, Kaohsiung 845, Taiwan

[5] Natl Taiwan Univ Sci & Technol, Dept Elect Engn, Grad Inst Electroopt Engn, Taipei 106, Taiwan

来源：

IEEE SENSORS JOURNAL | 2012年 / 12卷 / 06期

关键词：

CuO nanowire; humidity sensor;

D O I：

10.1109/JSEN.2011.2180375

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The authors report the growth of CuO nanowires on an oxidized Cu wire and the fabrication of a CuO nanowire humidity sensor. It was found that we could transform a Cu wire into CuO/Cu2O/Cu core-shell tri-layers covered with high density CuO nanowires by thermal annealing. It was also found that steady state currents of the sensor were about 2.44, 2.32, 2.23, and 2.15 mu A, respectively, when measured with 20, 40, 60, and 80% relative humidity. Furthermore, it was found that sensing property of the fabricated device was stable and reproducible.

引用

页码：1884 / 1888

页数：5

共 50 条

[1] A ZnO nanowire-based humidity sensor
Chang, Sheng-Po
Chang, Shoou-Jinn
Lu, Chien-Yuan
Li, Meng-Ju
Hsu, Cheng-Liang
Chiou, Yu-Zung
Hsueh, Ting-Jen
Chen, I-Cherng
SUPERLATTICES AND MICROSTRUCTURES, 2010, 47 (06) : 772 - 778
[2] A Flexible ZnO Nanowire-Based Humidity Sensor
Hsueh, H. T.
Hsueh, T. J.
Chang, S. J.
Hung, F. Y.
Hsu, C. L.
Dai, B. T.
Lam, K. T.
Wen, K. H.
IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2012, 11 (03) : 520 - 525
[3] CuO nanowire-based humidity sensors prepared on glass substrate
Hsueh, H. T.
Hsueh, T. J.
Chang, S. J.
Hung, F. Y.
Tsai, T. Y.
Weng, W. Y.
Hsu, C. L.
Dai, B. T.
SENSORS AND ACTUATORS B-CHEMICAL, 2011, 156 (02): : 906 - 911
[4] Nanowire-based hydrogen sensor
Dagani, R
CHEMICAL & ENGINEERING NEWS, 2001, 79 (39) : 14 - 14
[5] Fabrication of a Single CuO Nanowire-based Gas Sensor Working at Room Temperature
Huang, Chaolei
Tian, Xiaojun
Liu, Jie
Wang, Wenxue
Dong, Zaili
Liu, Lianqing
2013 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO), 2013, : 108 - 113
[6] Silicon nanowire-based ammonia gas sensor with enhanced response at elevated humidity levels
Sultan, M. T.
Fakhri, E.
Powroznik, P.
Manolescu, A.
Jakubik, W.
Kazmierczak-Balata, A.
Svavarsson, H. G.
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2025, 40 (03)
[7] Carbon nanowire-based temperature sensor
Zaitsev, Alexander M.
Levine, Alfred M.
Zaidi, Sohail H.
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2007, 204 (10): : 3574 - 3579
[8] Nanowire-based electromechanical biomimetic sensor
Tonisch, K.
Cimalla, V.
Will, F.
Weise, F.
Stubenrauch, M.
Albrecht, A.
Hoffmann, M.
Ambacher, O.
PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2007, 37 (1-2): : 208 - 211
[9] ZnO Nanowire-based Oxygen Gas Sensor
Lu, C. Y.
Chang, S. P.
Chang, S. J.
EDSSC: 2008 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS, 2008, : 268 - 271
[10] ZnO Nanowire-Based Oxygen Gas Sensor
Lu, Chien-Yuan
Chang, Sheng-Po
Chang, Shoou-Jinn
Hsueh, Ting-Jen
Hsu, Cheng-Liang
Chiou, Yu-Zung
Chen, Cherng
IEEE SENSORS JOURNAL, 2009, 9 (04) : 485 - 489

← 1 2 3 4 5 →