Thin film deposition by laser ablation

被引：0
作者：
Duley, WW
机构：
来源：
LASER PROCESSING: SURFACE TREATMENT AND FILM DEPOSITION | 1996年 / 307卷
关键词：
D O I：
暂无
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Most refractory materials can be deposited in thin film form by laser sputtering or ablation of precursor solids. Ablation of solids using UV excimer laser radiation can yield high deposition rates, deposition of monolayers and stoichiometric deposits. This paper summarizes available data on the deposition of a variety of non metallic solids using laser ablation. Mechanisms involved in the deposition of diamond-like carbon films are discussed as a special case.
引用
收藏
页码：739 / 750
页数：12
相关论文
共 50 条
[21]   Laser ablation of boron carbide, thin-film deposition and plume analysis [J].
Kokai, F ;
Taniwaki, M ;
Takahashi, K ;
Goto, A ;
Ishihara, M ;
Yamamoto, K ;
Koga, Y .
DIAMOND AND RELATED MATERIALS, 2001, 10 (3-7) :1412-1416
[22]   Deposition of thin films by laser ablation [J].
Thareja, RK ;
Dwivedi, RK ;
Misra, A ;
Mitra, A ;
Neogi, A .
METALS MATERIALS AND PROCESSES, 1998, 10 (03) :217-230
[23]   Plume behavior and thin film deposition by laser ablation using an hellicoidal shadow mask [J].
Marcu, A ;
Grigoriu, C ;
Jang, W ;
Yatsui, K .
SIOEL '99: SIXTH SYMPOSIUM ON OPTOELECTRONICS, 2000, 4068 :576-581
[24]   Synthesis of BiFeO3 ceramic targets and thin film deposition by laser ablation [J].
Mardare, CC ;
Tavares, PB ;
Mardare, AI ;
Savu, R .
ADVANCED MATERIALS FORUM III, PTS 1 AND 2, 2006, 514-516 :328-332
[25]   ZnO thin film deposition by laser ablation of Zn target in oxygen reactive atmosphere [J].
Dinescu, M ;
Verardi, P .
APPLIED SURFACE SCIENCE, 1996, 106 :149-153
[26]   Compositionally gradient thin film deposition by pulse laser ablation under high gravity [J].
Nishiyama, Takashi ;
Kajiwara, Takashi ;
Nagayama, Kunihito .
DIFFUSION IN MATERIALS - DIMAT 2011, 2012, 323-325 :559-563
[27]   AlN thin film deposition by pulsed laser ablation of Al in NH3 [J].
Guidoni, AG ;
Mele, A ;
DiPalma, TM ;
Flamini, C ;
Orlando, S .
THIN SOLID FILMS, 1997, 295 (1-2) :77-82
[28]   AlN thin film deposition by pulsed laser ablation of Al in NH3 [J].
Universita `La Sapienza', Rome, Italy .
Thin Solid Films, 1-2 (77-82)
[29]   Deposition of a thin polystyrene film by anthracene-photosensitized laser ablation at 351 nm [J].
Tsuboi, Y ;
Itaya, A .
APPLIED PHYSICS LETTERS, 1999, 74 (25) :3896-3898
[30]   In situ monitoring by mass spectrometry of laser ablation plumes used in thin film deposition [J].
Hastie, JW ;
Paul, AJ ;
Bonnell, DW ;
Schenck, PK .
SYNTHESIS AND CHARACTERIZATION OF ADVANCED MATERIALS, 1998, 681 :39-50
12345