Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation

被引：169

作者：

Xiong, Wei ^{[1
]}

Zhou, Yun Shen ^{[1
]}

He, Xiang Nan ^{[1
]}

Gao, Yang ^{[1
]}

Mahjouri-Samani, Masoud ^{[1
]}

Jiang, Lan ^{[2
]}

Baldacchini, Tommaso ^{[1
,3
]}

Lu, Yong Feng ^{[1
]}

机构：

[1] Univ Nebraska, Dept Elect Engn, Lincoln, NE 68588 USA

[2] Beijing Inst Technol, Dept Mech & Automat Engn, Beijing 100081, Peoples R China

[3] Newport Corp, Technol & Applicat Ctr, Irvine, CA 92606 USA

来源：

LIGHT-SCIENCE & APPLICATIONS | 2012年 / 1卷

基金：

中国国家自然科学基金; 美国国家科学基金会;

关键词：

femtosecond laser direct writing; femtosecond laser multiphoton ablation; micro-/nanofabrication; two-photon polymerization; TRANSPARENT MATERIALS; DRIVEN; MICROFABRICATION; COMPONENTS; STORAGE; LIGHT;

D O I：

10.1038/lsa.2012.6

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Modern three-dimensional nanofabrication requires both additive and subtractive processes. However, both processes are largely isolated and generally regarded as incompatible with each other. In this study, we developed simultaneous additive and subtractive fabrication processes using two-photon polymerization followed by femtosecond (fs) laser multiphoton ablation. To demonstrate the new capability, submicrometer polymer fibers containing periodic holes of 500-nm diameter and microfluidic channels of 1-mu m diameter were successfully fabricated. This method combining both two-photon polymerization and fs laser ablation improves the nanofabrication efficiency and enables the fabrication of complex three-dimensional micro-/nanostructures, promising for a wide range of applications in integrated optics, microfluidics and microelectromechanical systems.

引用

页码：e6 / e6

页数：4

共 21 条

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