Optimization of the conditions for recording secondary-emission signals during the 2D metrology of nanostructures

被引：1
|
作者：
Kaz'miruk, V. V. [1 ]
Savitskaya, T. N. [1 ]
机构：
[1] Russian Acad Sci, Inst Microelect Technol & High Pur Mat, Chernogolovka 142432, Moscow Oblast, Russia
来源：
JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES | 2013年 / 7卷 / 01期
关键词：
7;
D O I：
10.1134/S1027451013010254
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
The problem of choosing the optimal conditions to obtain informative signals during the optoelectronic monitoring of periodic structures with element sizes in the micron and nanometer ranges is considered. DOI: 10.1134/S1027451013010254
引用
收藏
页码：181 / 186
页数：6
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