The effect of deposition temperature on the growth of TiC whiskers by the vapor-liquid-solid mechanism

An experimental study was made of the effect of deposition temperature on the growth of TiC whiskers prepared by the CVD process. The TiC whiskers were obtained with high yield in the rather low temperature range from 1220 to 1370 K, using a TiCl4-CH4-H-2-Ar gas mixture and a pure nickel substrate. An examination of the morphology of the TiC whiskers was made and the VLS growth mechanism was verified experimentally. The effect of deposition temperature on the growth of TiC whiskers is discussed and explained according to the VLS mechanism, and the appropriate temperature range for the growth of TiC whiskers using nickel substrates was found.