Linear variable optical filter-based ultraviolet microspectrometer

被引：33

作者：

Emadi, Arvin ^{[1
]}

Wu, Huaiwen ^{[1
]}

de Graaf, Ger ^{[1
]}

Enoksson, Peter ^{[2
]}

Correia, Jose Higino ^{[3
]}

Wolffenbuttel, Reinoud ^{[1
]}

机构：

[1] Delft Univ Technol, Fac Elect Engn Math & Comp Sci, Dept Microelect Elect Instrumentat, NL-2628 CD Delft, Netherlands

[2] MC2 Chalmers Univ Technol, BioNano Syst Lab, SE-41296 Gothenburg, Sweden

[3] Univ Minho, Dept Ind Elect, P-4800 Guimaraes, Portugal

来源：

APPLIED OPTICS | 2012年 / 51卷 / 19期

关键词：

SPECTROSCOPY; RESOLUTION; ROUGHNESS; CHIP;

D O I：

10.1364/AO.51.004308

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An IC-compatible linear variable optical filter (LVOF) for application in the UV spectral range between 310 and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on a fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm. (C) 2012 Optical Society of America

引用

页码：4308 / 4315

页数：8

共 23 条

[1]

[Anonymous], 2000, Principles of optics: electromagnetic theory of propagation, interference and diffraction of light

[2] PHASE RETARDANCE OF PERIODIC MULTILAYER MIRRORS [J].

APFEL, JH .

APPLIED OPTICS, 1982, 21 (04) :733-738

[3] ANALYTIC EXPRESSIONS FOR THE REFLECTION DELAY, PENETRATION DEPTH, AND ABSORPTANCE OF QUARTER-WAVE DIELECTRIC MIRRORS [J].

BABIC, DI ;

CORZINE, SW .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1992, 28 (02) :514-524

[4]

BLANCO JR, 1985, APPL OPTICS, V24, P3773, DOI 10.1364/AO.24.003773

[5]

Chen FZ, 1999, PLANET SPACE SCI, V47, P261, DOI 10.1016/S0032-0633(98)00074-9

[6]

Collins R., 2005, Handbook of Ellipsometry, DOI DOI 10.1007/3-540-27488-X

[7]

CORREIA J H, 2007, ECS T, V4, P141

[8] Vertically tapered layers for optical applications fabricated using resist reflow [J].

Emadi, A. ;

Wu, H. ;

Grabarnik, S. ;

de Graaf, G. ;

Wolffenbuttel, R. F. .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (07)

[9]

Emadi A., 2010, THESIS TU DELFT

[10] Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter [J].

Emadi, Arvin ;

Wu, Huaiwen ;

de Graaf, Ger ;

Wolffenbuttel, Reinoud .

OPTICS EXPRESS, 2012, 20 (01) :489-507

← 1 2 3 →