Optical scanning extrinsic Fabry-Perot interferometer for absolute microdisplacement measurement

被引：19
|
作者：
Li, TC [1 ]
May, RG [1 ]
Wang, A [1 ]
Claus, RO [1 ]
机构：
[1] VIRGINIA POLYTECH INST & STATE UNIV, BRADLEY DEPT ELECT ENGN, FIBER ELECTROOPT RES CTR, BLACKSBURG, VA 24061 USA
来源：
APPLIED OPTICS | 1997年 / 36卷 / 34期
关键词：
D O I：
10.1364/AO.36.008858
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We report an optical-scanning, dual-fiber, extrinsic Fabry-Perot interferometer system for absolute measurement of microdisplacement. The system involves two air-gapped Fabry-Perot cavities, formed by fiber end faces, functioning as sensing and reference elements. Taking the scanning wavelength as an interconverter to compare the gap length of the sensing head with the reference-cavity length yields the absolute measurement of the sensing-cavity length. The measurement is independent of the wavelength-scanning accuracy, and the reference-cavity length can be self-calibrated simply by one's changing the sensing-head length by an accurate value. (C) 1997 Optical Society of America.
引用
收藏
页码：8858 / 8861
页数：4
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