Manufacture of Granular Polysilicon from Trichlorosilane in a Fluidized-Bed Reactor

被引：14

作者：

Wang, Chenjing ^{[1
]}

Wang, Tiefeng ^{[1
]}

Wang, Zhanwen ^{[1
]}

机构：

[1] Tsinghua Univ, Dept Chem Engn, Beijing Key Lab Green React Engn & Technol, Beijing 100084, Peoples R China

来源：

CHEMICAL ENGINEERING & TECHNOLOGY | 2012年 / 35卷 / 05期

关键词：

Chemical vapor deposition; Fluidized-bed reactor; Polysilicon; Trichlorosilane; SILICON DEPOSITION; SILANE PYROLYSIS; FEEDSTOCK; INDUSTRY; DISILANE; GROWTH; CVD;

D O I：

10.1002/ceat.201100286

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

Manufacturing of polysilicon by chemical vapor deposition from SiHCl3 in a fluidized-bed reactor was studied. The effects of reaction temperature, H2/SiHCl3 ratio, gas velocity, and seed particle loading were evaluated. The outlet gas composition was analyzed by gas chromatography. The physical features of the product particles were determined by scanning electron microscopy and laser particle size analyzer. Well-grown product particles were obtained. The temperature and H2/SiHCl3 ratio significantly affected conversion, yield, and selectivity, which were less affected by gas velocity and seed particle loading at higher temperatures. The surface reaction kinetics determined the product yield only at lower temperatures, and thermodynamic equilibrium was approached at temperatures above 900 degrees C.

引用

页码：893 / 898

页数：6

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