Metal-organic vapor deposition of YSZ electrolyte layers for solid oxide fuel cell applications

被引：103

作者：

Chour, KW ^{[1
]}

Chen, J ^{[1
]}

Xu, R ^{[1
]}

机构：

[1] UNIV UTAH,DEPT MAT SCI & ENGN,SALT LAKE CITY,UT 84112

来源：

THIN SOLID FILMS | 1997年 / 304卷 / 1-2期

关键词：

films; MOCVD; SOFC; YSZ;

D O I：

10.1016/S0040-6090(97)00017-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Yttria-stabilized zirconia films have been deposited onto doped ceria discs for fuel cell applications, The deposition is achieved by hydrolysis-assisted pyrolysis reactions in a low-pressure reactor. Film cracking can be alleviated by reducing the substrate temperature continuously during deposition. A model analysis of the kinetic data provides insight into the nature of the hydrolysis-;assisted pyrolytic deposition reactions. Compared with structures made by sputtering and the set-gel process, significant improvements in open-circuit voltages are observed. (C) 1997 Elsevier Science S.A.

引用

页码：106 / 112

页数：7

共 19 条

[1] CHARACTERISTICS OF GROWTH OF FILMS OF ZIRCONIUM AND HAFNIUM OXIDES (ZRO2, HFO2) BY THERMAL-DECOMPOSITION OF ZIRCONIUM AND HAFNIUM BETA-DIKETONATE COMPLEXES IN THE PRESENCE AND ABSENCE OF OXYGEN [J].