Thickness-dependent (001) orientation and surface morphology of rapid-annealed FePt thin films on a glass substrate

被引:3
作者
Liu, S. H. [1 ]
Chou, C. L. [1 ]
Hsiao, S. N. [1 ]
Chen, S. K. [1 ]
Lee, H. Y. [2 ,3 ]
机构
[1] Feng Chia Univ, Mat Sci & Engn, Taichung 407, Taiwan
[2] Natl Synchrotron Radiat Res Ctr, Hsinchu 300, Taiwan
[3] Natl Hsinchu Univ Educ, Dept Appl Sci, Hsinchu 300, Taiwan
关键词
Magnetic materials; Thin films; Residual stresses; Magnetic anisotropy; Crystallographic anisotropy; FePt thin film; Intrinsic film stress; Surface morphology; (001) orientation; MAGNETIC-ANISOTROPY; UNDERLAYER; GROWTH;
D O I
10.1016/j.vacuum.2015.04.033
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thickness-dependent (001) orientation and surface morphology of rapid-annealed FePt thin films were investigated. For the rapid annealed FePt films with different thicknesses (5-60 nm), the ordering parameters were obtained to be higher than 0.9. As film thickness (t) was increased from 5 to 20 nm, the Lotgering orientation factor (LOF) increased from 0.75 to 0.99 (nearly perfect 001 texture), and then decreased to 0.85 for films with t = 60 nm. Surface morphology observation indicates an evolution from a continuous to island-like structure with decreasing t. Due to high temperature annealing, the surface atomic diffusion and substrate-film interfacial diffusion results in the de-wetting of film structure, when t is thin. This morphological change leads to the stress-relaxation of the preformed tensile stress induced by the impingement of grain growth, which further causes a decrease of LOF. (C) 2015 Elsevier Ltd. All rights reserved.
引用
收藏
页码:305 / 309
页数:5
相关论文
共 6 条
  • [1] Critical Thickness of (001) Texture Induction in FePt Thin Films on Glass Substrates
    Mei, J. K.
    Yuan, F. T.
    Liao, W. M.
    Sun, A. C.
    Yao, Y. D.
    Lin, H. M.
    Hsu, J. H.
    Lee, H. Y.
    IEEE TRANSACTIONS ON MAGNETICS, 2011, 47 (10) : 3633 - 3636
  • [2] Epitaxial τ phase MnAl thin films on MgO (001) with thickness-dependent magnetic anisotropy
    Cui, Yishen
    Yin, Wenjing
    Chen, Wei
    Lu, Jiwei
    Wolf, Stuart A.
    JOURNAL OF APPLIED PHYSICS, 2011, 110 (10)
  • [3] Thickness-dependent glass transition temperature of thin resist films for high resolution lithography
    Marceau, S.
    Tortai, J. -H.
    Tillier, J.
    Vourdas, N.
    Gogolides, E.
    Raptis, I.
    Beltsios, K.
    van Werden, K.
    MICROELECTRONIC ENGINEERING, 2006, 83 (4-9) : 1073 - 1077
  • [4] Effect of intrinsic tensile stress on (001) orientation in L10 FePt thin films on glass substrates
    Hsiao, S. N.
    Liu, S. H.
    Chen, S. K.
    Yuan, F. T.
    Lee, H. Y.
    JOURNAL OF APPLIED PHYSICS, 2012, 111 (07)
  • [5] Substrate Temperature Dependent Surface Morphology of Nanostructured Zinc Antimonides Thin Films
    Faudzi, Ahmad 'Athif Mohd
    Mukri, Mohd 'Azizir-Rahim
    Ismail, Abdul Khamim
    Omar, Muhammad Firdaus
    2015 10TH ASIAN CONTROL CONFERENCE (ASCC), 2015,
  • [6] A room-temperature ultrafast carrier dynamical study and thickness-dependent investigation of WTe2 thin films on a flexible PET substrate
    Verma, Sahil
    Kumar, Kapil
    Yadav, Reena
    Pandey, Animesh
    Kaur, Mandeep
    Kumar, Mahesh
    Husale, Sudhir
    PHYSICA SCRIPTA, 2024, 99 (10)