Vibration Measurement Using a Fringe Pattern in Reflective Monochromatic Interferometry

This paper introduces methods to measure vibration using a fringe pattern. These methods use variations of a fringe pattern in reflective monochromatic interferometry, without additional components. With the proposed methods we measured the vibrations of four waveform with amplitude 100 nm. When the vibrational amplitude is greater than a quarter wavelength of the light employed, however, the measured results are distorted due to ambiguity. Thus we propose advanced methods to solve this problem, and also measure the vibrations of two waveformswith an amplitude of 1 mu m. To verify the performance of the proposed methods, we compare the results to those from an accelerometer. Multifrequency vibrations of 1, 5, 10, and 20 Hz are measured by both techniques, and the results compared in the frequency domain.