Field emission properties of DLC and phosphorus-doped DLC films prepared by electrochemical deposition process

被引：15

作者：

Wan, Shanhong ^{[1
,2
]}

Wang, Liping ^{[1
]}

Zhang, Junyan ^{[1
]}

Xue, Qunji ^{[1
]}

机构：

[1] Chinese Acad Sci, State Key Lab Solid Lubricat, Lanzhou Inst Chem Phys, Lanzhou 730000, Peoples R China

[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 06期

基金：

中国国家自然科学基金;

关键词：

Phosphorus-doped DLC film; Electrochemical deposition; Field emission behavior; DIAMOND-LIKE CARBON; TETRAHEDRAL AMORPHOUS-CARBON; ELECTRON-EMISSION; CATHODES;

D O I：

10.1016/j.apsusc.2008.10.061

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Field emission behavior of diamond-like carbon (DLC) and phosphorus-doped DLC (p-DLC) films prepared by electrochemical deposition process was comparatively investigated. It was shown phosphorus incorporation in the DLC film could lower the turn on field from 12 to 9.5 V/mu m and increase the current density from 12.6 to 45.7 mu A/mm(2) under high electric field. And better field emission performance of p-DLC films would be mainly attributed to the influence of the surface morphology and the changes of microstructure due to the phosphorus incorporation. (c) 2008 Elsevier B.V. All rights reserved.

引用

页码：3817 / 3821

页数：5

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