Grating-Corner-Cube-Based Roll Angle Sensor

被引:10
作者
Zhou, Siyu [1 ]
Le, Vunam [1 ]
Mi, Qinggai [1 ]
Wu, Guanhao [1 ]
机构
[1] Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
基金
北京市自然科学基金;
关键词
roll angle; grating-corner-cube sensor; diffraction and reflection characteristics; differential detection; ERROR MEASUREMENT; INTERFEROMETER; SYSTEM; RANGE; COMPENSATION; METROLOGY;
D O I
10.3390/s20195524
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
This paper presents a specifically designed grating-corner-cube sensor for precise roll angle measurements. Owing to the diffraction characteristics of the transmission grating and reflection characteristics of the corner cube, two spatially separated parallel beams are naturally constructed. Through differential detection of the positions of two parallel beams, we experimentally demonstrate the possibility of a precise roll angle measurement at a high refresh rate. A performance evaluation of the proposed technique indicates a stability of 0.46 arcsec over 5 min. Compared with a commercial autocollimator over a range of 500 arcsec, the residuals are maintained within +/- 2 arcsec with a standard deviation of 1.37 arcsec. Furthermore, a resolution of 0.8 arcsec can be achieved using the proposed method. The developed compact roll angle sensor has potential applications in academic and industrial fields.
引用
收藏
页码:1 / 9
页数:9
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