Self-scattering effects in femtosecond laser nanoablation

被引：8

作者：

Zhang, Hao ^{[1
]}

Krol, Denise M. ^{[1
,2
]}

Dijkhuis, Jaap I. ^{[1
]}

van Oosten, Dries ^{[1
]}

机构：

[1] Univ Utrecht, Debye Inst Nanomat Sci, NL-3508 TA Utrecht, Netherlands

[2] Univ Calif Davis, Dept Appl Sci, Davis, CA 95616 USA

来源：

OPTICS LETTERS | 2013年 / 38卷 / 23期

基金：

美国国家科学基金会;

关键词：

CRYSTALLINE SILICON; ABLATION;

D O I：

10.1364/OL.38.005032

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We experimentally investigate the self-reflectivity of intense strongly focused femtosecond laser pulses used for single-shot femtosecond laser ablation of silicon-on-insulator (SOI). We model the self-reflectivity using 2D finite-difference time-domain simulations of a single femtosecond laser pulse interacting with a submicrometer-sized time-and space-dependent plasma induced by the incident pulse itself and find excellent agreement with our experimental results. The simulation shows that the laser-induced plasma scatters the incident pulse into the guided modes of the device layer of the SOI. (C) 2013 Optical Society of America

引用

页码：5032 / 5035

页数：4

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