Self-scattering effects in femtosecond laser nanoablation

被引：8
|
作者：
Zhang, Hao [1 ]
Krol, Denise M. [1 ,2 ]
Dijkhuis, Jaap I. [1 ]
van Oosten, Dries [1 ]
机构：
[1] Univ Utrecht, Debye Inst Nanomat Sci, NL-3508 TA Utrecht, Netherlands
[2] Univ Calif Davis, Dept Appl Sci, Davis, CA 95616 USA
来源：
OPTICS LETTERS | 2013年 / 38卷 / 23期
基金：
美国国家科学基金会;
关键词：
CRYSTALLINE SILICON; ABLATION;
D O I：
10.1364/OL.38.005032
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We experimentally investigate the self-reflectivity of intense strongly focused femtosecond laser pulses used for single-shot femtosecond laser ablation of silicon-on-insulator (SOI). We model the self-reflectivity using 2D finite-difference time-domain simulations of a single femtosecond laser pulse interacting with a submicrometer-sized time-and space-dependent plasma induced by the incident pulse itself and find excellent agreement with our experimental results. The simulation shows that the laser-induced plasma scatters the incident pulse into the guided modes of the device layer of the SOI. (C) 2013 Optical Society of America
引用
收藏
页码：5032 / 5035
页数：4
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