Modelling the deformation of nickel foil during manufacturing of nanostructures on injection moulding tool inserts

In the present work, a manufacturing process for transferring nanostructures from a glass wafer, to a double-curved insert for injection moulding is demonstrated. A nanostructure consisting of sinusoidal cross-gratings with a period of 426 nm is successfully transferred to hemispheres on an aluminium substrate with three different radii; 500 mu m, 1000 mu m and 2000 mu m, respectively. The nanoimprint is performed using a 50 mu m thick nickel foil, manufactured using electroforming. During the imprinting process, the nickel foil is stretched due to the curved surface of the aluminium substrate. Experimentally, it is possible to address this stretch by counting the periods of the cross-gratings via SEM characterization. A model for the deformation of the nickel foil during nanoimprint is developed, utilizing non-linear material and geometrical behaviour. Good agreement between measured and numerically calculated stretch ratios on the surface of the deformed nickel foil is found, and it is shown, that from the model it is also possible to predict the geometrical extend of the nanostructured area on the curved surfaces.