The Realization of the Parametric Excitation on MEMS Gyroscope

被引：0
|
作者：
Qian, Lei [1 ]
Zhao, Heming [1 ]
Xu, Dacheng [1 ]
Zhang, Xiaofeng [1 ]
机构：
[1] Soochow Univ, Sch Elect & Informat Engn, Suzhou, Peoples R China
来源：
PROCEEDINGS OF THE 2017 INTERNATIONAL CONFERENCE ON APPLIED MATHEMATICS, MODELING AND SIMULATION (AMMS 2017) | 2017年 / 153卷
关键词：
MEMS gyroscope; parametric excitation; closed-loop system;
D O I：
暂无
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
In this paper, parametric excitation is applied to the excitation of a micro-ring gyroscope. The primary objective of this work is to improve the dynamic gain. It is show that, by adjusting the parametric excitation parameters, the harmonic forcing can be reduced whilst the gain of frequency response can be amplified. Because of the different frequencies of the excitation and harmonic forcing, the unwanted effect of electrical feed-through can keep in a minimum value.
引用
收藏
页码：36 / 39
页数：4
相关论文
共 50 条
  • [41] Design and modeling of MEMS capacitive gyroscope
    Singh, Prashant
    Gupta, Prachi
    Srivastava, Pooja
    Chaudhary, Rajshri Kumari
    2013 INTERNATIONAL CONFERENCE ON ENERGY EFFICIENT TECHNOLOGIES FOR SUSTAINABILITY (ICEETS), 2013,
  • [42] Modeling and Simulation of the MEMS Vibratory Gyroscope
    Patel, Chandradip
    McCluskey, Patrick
    2012 13TH IEEE INTERSOCIETY CONFERENCE ON THERMAL AND THERMOMECHANICAL PHENOMENA IN ELECTRONIC SYSTEMS (ITHERM), 2012, : 928 - 933
  • [43] Modal parameter identification of a MEMS gyroscope
    M'Closkey, RT
    Gibson, S
    Hui, J
    PROCEEDINGS OF THE 2000 AMERICAN CONTROL CONFERENCE, VOLS 1-6, 2000, : 1699 - 1704
  • [44] Integrated PNZT structures for MEMS gyroscope
    Nistorica, C
    Zhang, R
    Padmini, P
    Kotru, S
    Pandey, RK
    INTEGRATED FERROELECTRICS, 2004, 63 : 49 - 54
  • [45] A parametrically amplified MEMS rate gyroscope
    Hu, Z. X.
    Gallacher, B. J.
    Burdess, J. S.
    Fell, C. P.
    Townsend, K.
    SENSORS AND ACTUATORS A-PHYSICAL, 2011, 167 (02) : 249 - 260
  • [46] MEMS Gyroscope FEM Modeling and Simulation
    Nazdrowicz, Jacek
    Szermer, Michal
    Stawinski, Adam
    Napieralski, Andrzej
    PROCEEDINGS OF THE 25TH INTERNATIONAL CONFERENCE MIXED DESIGN OF INTEGRATED CIRCUITS AND SYSTEM (MIXDES 2018), 2018, : 280 - 284
  • [47] Study on MEMS Tunneling Effect Gyroscope
    Shi Yunbo
    Zhang Qiong
    Li Junhong
    Tong Xiaogang
    Ma Zongmin
    Liu Jun
    ISIE: 2009 IEEE INTERNATIONAL SYMPOSIUM ON INDUSTRIAL ELECTRONICS, 2009, : 926 - +
  • [48] MEMS gyroscope with double gimbal structure
    Maenaka, K
    Sawai, N
    Ioku, S
    Sugimoto, H
    Suzuki, H
    Fujita, T
    Takayama, Y
    BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, : 163 - 166
  • [49] Fabrication and characterization of an SOI MEMS gyroscope
    Zhong Weiwei
    Han Guowei
    Si Chaowei
    Ning Jin
    Yang Fuhua
    JOURNAL OF SEMICONDUCTORS, 2013, 34 (06)
  • [50] Design principle of suspension of MEMS gyroscope
    Shi, Qin
    Wang, Shourong
    Qiu, Anping
    Xu, Yishen
    Ji, Xunsheng
    2006 1ST IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2006, : 242 - 245
12345