The Realization of the Parametric Excitation on MEMS Gyroscope

被引:0
|
作者
Qian, Lei [1 ]
Zhao, Heming [1 ]
Xu, Dacheng [1 ]
Zhang, Xiaofeng [1 ]
机构
[1] Soochow Univ, Sch Elect & Informat Engn, Suzhou, Peoples R China
来源
PROCEEDINGS OF THE 2017 INTERNATIONAL CONFERENCE ON APPLIED MATHEMATICS, MODELING AND SIMULATION (AMMS 2017) | 2017年 / 153卷
关键词
MEMS gyroscope; parametric excitation; closed-loop system;
D O I
暂无
中图分类号
TP18 [人工智能理论];
学科分类号
081104 ; 0812 ; 0835 ; 1405 ;
摘要
In this paper, parametric excitation is applied to the excitation of a micro-ring gyroscope. The primary objective of this work is to improve the dynamic gain. It is show that, by adjusting the parametric excitation parameters, the harmonic forcing can be reduced whilst the gain of frequency response can be amplified. Because of the different frequencies of the excitation and harmonic forcing, the unwanted effect of electrical feed-through can keep in a minimum value.
引用
收藏
页码:36 / 39
页数:4
相关论文
共 50 条
  • [31] 100 kHz MEMS Vibratory Gyroscope
    Liewald, Jan-Timo
    Kuhlmann, Burkhard
    Balslink, Thorsten
    Traechtler, Martin
    Dienger, Matthias
    Manoli, Yiannos
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2013, 22 (05) : 1115 - 1125
  • [32] ACTUATION OF A FREQUENCY MODULATED MEMS GYROSCOPE
    Xie, Michael
    Park, Sangtak
    Abdel-Rahman, Eihab
    Yavuz, Mustafa
    PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, 2014, VOL 6, 2014,
  • [33] Precise MEMS gyroscope with ladder structure
    Mochida, Yoichi
    Kato, Yoshitaka
    Konaka, Yoshihiro
    Mori, Akira
    Kobayashi, Masato
    Kobayashi, Shinji
    TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007,
  • [34] Analysis of a MEMS gyroscope interface circuit
    Wang, HQ
    Jin, ZH
    Jiao, JW
    Wang, YL
    2004: 7TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY, VOLS 1- 3, PROCEEDINGS, 2004, : 1804 - 1807
  • [35] Surface acoustic wave MEMS gyroscope
    Jose, KA
    Suh, WD
    Xavier, PB
    Varadan, VK
    Varadan, VV
    WAVE MOTION, 2002, 36 (04) : 367 - 381
  • [36] Analysis and compensation of MEMS gyroscope drift
    Diao, Zhanlin
    Quan, Haiyang
    Lan, Lidong
    Han, Yifei
    2013 SEVENTH INTERNATIONAL CONFERENCE ON SENSING TECHNOLOGY (ICST), 2013, : 592 - 596
  • [37] Adaptive control of a simulated MEMS gyroscope
    Khasawneh, QA
    Batur, C
    MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) - 2003, 2003, : 277 - 282
  • [38] Fabrication and characterization of an SOI MEMS gyroscope
    钟卫威
    韩国威
    司朝伟
    宁谨
    杨富华
    Journal of Semiconductors, 2013, (06) : 58 - 62
  • [39] Development of a MEMS Gyroscope for Northfinding Applications
    Johnson, Burgess R.
    Cabuz, Eugen
    French, Howard B.
    Supino, Ryan
    2010 IEEE-ION POSITION LOCATION AND NAVIGATION SYMPOSIUM PLANS, 2010, : 48 - 50
  • [40] Fabrication and characterization of an SOI MEMS gyroscope
    钟卫威
    韩国威
    司朝伟
    宁谨
    杨富华
    Journal of Semiconductors, 2013, 34 (06) : 58 - 62