Automated COM Parameter Extraction for SiO2/LiNbO3 and SiO2/LiTaO3 substrates

被引：0

作者：

Malocha, Svetlana ^{[1
]}

Gamble, Kevin J. ^{[1
]}

Dong, Hao ^{[1
]}

Dharmalingam, Arun ^{[1
]}

机构：

[1] Qorvo Inc, Apopka, FL 32703 USA

来源：

2016 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2016年

关键词：

COM model; COM parameters; RF SAW filters;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper automated COM parameter extraction approach is described. COM parameters (velocity, reflectivity, coupling, propagation loss) are extracted from measurements of a set of test structures. Measurement data are validated prior to the parameter extraction. Frequency dependence of the velocity and propagation loss is taken into account. The method is applied to both SAW and LSAW substrates. Good agreement between measured device responses, and responses simulated using extracted COM parameters is shown for several examples of the devices built on SiO2/LiNbO3 and SiO2/LiTaO3 substrates.

引用

页数：4