Design and simulation of a novel check valve made by SU-8

被引：0

作者：

Guo, Tai ^{[1
]}

Zhang, Congchun ^{[1
]}

Ding, Guifu ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Res Inst Micro Nano Sci & Technol, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China

来源：

ADVANCED MECHANICAL DESIGN, PTS 1-3 | 2012年 / 479-481卷

关键词：

MEMS; SU-8; micro check valve; FABRICATION;

D O I：

10.4028/www.scientific.net/AMR.479-481.2271

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper, we describe the design, simulation of a novel check valve suitable for potentially embedding in polymeric microfluidic devices such as micro-pumps. Using SU-8 as functional material, the check valve can be fabricated by MEMS technology, such as, UV-LIGA and electroforming. The check valve mainly consists of two structural layers: inlet layer and valve membrane layer. From simulation, the maximum deflection of check valve membrane is 116 mu m under pressure of 2000Pa, and the maximum stress is 18.1MPa. We consider the fit thickness of valve membrane is 20 mu m. Simulation results demonstrate that this novel check valve can be potentially integrated in many micro-pumps and other lab-on-a-chip systems.

引用

页码：2271 / 2274

页数：4

共 7 条

[1]

Feng G-H, 2004, MICROMECHANICS MICRO, V14, P35

[2]

Gen Zhaoxin, 2008, NANOTECHNOLOGY PRECI, V6, P343

[3] Fabrication of multi-layer SU-8 microstructures [J].