White light phase-shifting interferometry with self-compensation of PZT scanning errors

被引：11

作者：

Kim, SW ^{[1
]}

Kang, MG ^{[1
]}

Lee, SY ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Mech Engn, Taejon 305701, South Korea

来源：

OPTICAL ENGINEERING FOR SENSING AND NANOTECHNOLOGY (ICOSN'99) | 1999年 / 3740卷

关键词：

white light interferometry; self-calibration; scanning errors; measurement uncertainty; surface metrology;

D O I：

10.1117/12.347782

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

One of main error sources in scanning white light interferometry is the inaccuracy of scanning mechanisms for which PZT piezoelectric ceramics actuators are widely used. In this paper, we propose a new calibration method being capable of identifying actual scanning errors directly by analyzing the spectral distribution of sampled interferograms. Experimental results prove that the method provides an effective means of in-silts self-calibration enhancing the measurement uncertainty by one order of magnitude.

引用

页码：16 / 19

页数：4

共 7 条

[1]

BORN M, 1985, PRINCIPLES OPTICS, P316

[2] 3-DIMENSIONAL IMAGE REALIZATION IN INTERFERENCE MICROSCOPY [J].

CHIM, SSC ;

KINO, GS .

APPLIED OPTICS, 1992, 31 (14) :2550-2553

[3]

CREATH K, 1997, P FRING 97, P52

[4] ABSOLUTE OPTICAL RANGING USING LOW COHERENCE INTERFEROMETRY [J].

DANIELSON, BL ;

BOISROBERT, CY .

APPLIED OPTICS, 1991, 30 (21) :2975-2979

[5]

Greivenkamp JE, 1991, OPTICAL SHOP TESTING

[6] IMPROVEMENT OF SCANNING ACCURACY OF PZT PIEZOELECTRIC ACTUATORS BY FEEDFORWARD MODEL-REFERENCE CONTROL [J].

JUNG, SB ;

KIM, SW .

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1994, 16 (01) :49-55

[7]

Kanai M, 1997, PROCEEDINGS OF THE TWELFTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, P414

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