Structural anisotropy in amorphous SnO2 film probed by X-ray absorption spectroscopy

被引:10
|
作者
Zhu, Q. [1 ]
Ma, Q. [1 ,2 ]
Buchholz, D. B. [1 ]
Chang, R. P. H. [1 ]
Bedzyk, M. J. [1 ]
Mason, T. O. [1 ]
机构
[1] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[2] Argonne Natl Lab, Adv Photon Source, Northwestern Synchrotron Res Ctr, DND CAT, Argonne, IL 60439 USA
基金
美国国家科学基金会;
关键词
FINE-STRUCTURE;
D O I
10.1063/1.4815984
中图分类号
O59 [应用物理学];
学科分类号
摘要
Polarization-dependent X-ray absorption measurements reveal the existence of structural anisotropy in amorphous (a-) SnO2 film. The anisotropy is readily seen for the second neighbor interaction whose magnitude differs along three measured directions. The differences can be well accounted for by 10%-20% variation in the Debye-Waller factor. Instead of a single Gaussian distribution found in crystalline SnO2, the Sn-O bond distribution is bimodal in a-SnO2 whose separation shows a weak angular dependence. The oxygen vacancies, existing in the a-SnO2 film in the order of 10 21 cm(-3), distribute preferentially along the film surface direction. (C) 2013 AIP Publishing LLC.
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页数:4
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