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- [5] Novel materials by atomic layer deposition and molecular layer deposition MRS Bulletin, 2011, 36 : 877 - 884
- [6] Role of titanium and organic precursors in molecular layer deposition of ?titanicone? hybrid materials BEILSTEIN JOURNAL OF NANOTECHNOLOGY, 2022, 13 : 1240 - 1255
- [10] Investigation of the transition of amorphous Ti-thiolate prepared by hybrid atomic layer deposition/molecular layer deposition into titanium disulfide ultrathin film JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2023, 41 (04):