Suspended channel MEMS fabrication process for advanced device design and bio-analytical functionalization

被引：0

作者：

Grigorov, Alexander Vladimirov ^{[1
]}

机构：

[1] Tech Univ Denmark, MIC Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

来源：

MICROELECTRONIC ENGINEERING | 2008年 / 85卷 / 11期

关键词：

MEMS; Suspended channels; Angled deposition; Surface stress detection; Resonant cantilever; Mass detection;

D O I：

10.1016/j.mee.2008.07.015

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a simple and novel process that allows the fabrication of suspended channel MEMS devices. Two basic types of suspended structures were fabricated using the new process, and a possible functionalization mechanism for bio-analytical detection and sensing using spotting and capillary action was successfully tested. Possible uses of the fabricated structures are described, as specific existing types of biochemical MEMS sensors. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：2290 / 2298

页数：9

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