Outgassing performance of an ionic liquid-based magnetic fluid

被引：14

作者：

Okabe, Takao ^{[1
]}

Kondo, Yukishige ^{[2
]}

Yoshimoto, Shigeka ^{[3
]}

Sasaki, Shinya ^{[3
]}

机构：

[1] Tokyo Univ Sci, Dept Appl Elect, Katsushika Ku, 6-3-1 Niijuku, Tokyo 1258585, Japan

[2] Tokyo Univ Sci, Dept Ind Chem, Shinjyuku Ku, 1-3 Kagurazaka, Tokyo 1628601, Japan

[3] Tokyo Univ Sci, Dept Mech Engn, Katsushika Ku, 6-3-1 Niijuku, Tokyo 1258585, Japan

来源：

VACUUM | 2019年 / 164卷

基金：

日本学术振兴会;

关键词：

Ionic liquid; Magnetic fluid; Dispersant; Outgassing; High-vacuum; Magnetic fluid seal; TRIBOLOGICAL PERFORMANCE; LUBRICANT ADDITIVES; NANOPARTICLES;

D O I：

10.1016/j.vacuum.2019.02.047

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this study, an ionic liquid (IL)-based magnetic fluid (MF) (IMF; IL-based MF) and dispersant was synthesized to create MF seals for rotational mechanisms in high-vacuum chambers, such as those in rotational electron beam mastering systems. The synthesized dispersant dispersed magnetite nanoparticles in pyridinium ionic liquid that is stable under magnetic fields. The outgassing from the IMF was investigated using a quadrupole mass spectrometer during a sliding test under high-vacuum conditions with a pressure of 10(-6) Pa. The fragmentation pattern of the outgassing from the IMF was very similar to that of the base IL. Pollution-causing fragments were not detected under vacuum conditions on the order of 10(-9) Pa. On the basis of our findings, we anticipate that the IMF is suitable for use in MF seals required in clean, high-vacuum conditions.

引用

页码：34 / 40

页数：7

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