Application of x-ray phase plate to grazing incidence x-ray topography for the control of penetration depth

被引：1

作者：

Hirano, Keiichi ^{[1
]}

Takahashi, Yumiko ^{[1
]}

Nagamachi, Shinji ^{[2
]}

机构：

[1] High Energy Accelerator Org, Inst Mat Struct Sci, Tsukuba, Ibaraki 3050801, Japan

[2] Nagamachi Sci Lab Co Ltd, Amagasaki, Hyogo 6610976, Japan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2013年 / 729卷

关键词：

Synchrotron radiation; X-ray; Topography; Optics; BRAGG-CASE DIFFRACTION; CRYSTAL; RETARDERS;

D O I：

10.1016/j.nima.2013.07.085

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The penetration depth of x-rays into a crystal is one of the most important parameters in grazing incidence x-ray topography. In this paper, we introduce a novel method for controlling the penetration depth by modifying the polarization of incident x-rays with fixed sample geometry and x-ray wavelength. We employed an x-ray phase plate in transmission geometry for controlling the polarization, and obtained x-ray topographs of an ion-implanted 4H-SiC epitaxial wafer with sigma- and pi-polarized x-rays. By comparing the two topographs, it was verified that the penetration depth of a-polarization is smaller than that of pi-polarization. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：537 / 540

页数：4

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