Giant magnetoelectric effect in vacuum

被引:82
作者
Kirchhof, Christine [1 ]
Krantz, Matthias [2 ]
Teliban, Iulian [3 ]
Jahns, Robert [3 ]
Marauska, Stephan [4 ]
Wagner, Bernhard [4 ]
Knoechel, Reinhard [3 ]
Gerken, Martina [2 ]
Meyners, Dirk [1 ]
Quandt, Eckhard [1 ]
机构
[1] Univ Kiel, Inst Mat Sci, D-24143 Kiel, Germany
[2] Univ Kiel, Inst Elect Engn, D-24143 Kiel, Germany
[3] Univ Kiel, Inst Elect Engn, High Frequency Lab, D-24143 Kiel, Germany
[4] Fraunhofer Inst Silicon Technol ISIT, D-25524 Itzehoe, Germany
关键词
BEAM RESONATORS; BRAIN-STIMULATION; COMPOSITES; CANTILEVER; PRESSURE; EPILEPSY;
D O I
10.1063/1.4810750
中图分类号
O59 [应用物理学];
学科分类号
摘要
Magnetoelectric (ME) thin film cantilever type sensors made of AlN and FeCoSiB are operated in vacuum, reducing air damping and thus increasing the ME coefficient and improving the limit of detection (LOD) for ac-magnetic fields. Depending on the sensor geometry, the response is increased by a factor of 5 resulting in a ME coefficient of 20 kV/cmOe at 152 Hz and by a factor of 11 with 12 kV/cmOe at 4.7 kHz and an improvement in LOD by an order of magnitude. Modelling these cantilevers reveals dominant contributions of viscoelastic and molecular damping above and intrinsic damping below 10(-2) mbar, respectively. (C) 2013 AIP Publishing LLC.
引用
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页数:4
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