The effects of film thickness on the electrical, optical, and structural properties of cylindrical, rotating, magnetron-sputtered ITO films

被引：62
作者：
Kim, Jae-Ho [1 ]
Seong, Tae-Yeon [1 ]
Ahn, Kyung-Jun [2 ]
Chung, Kwun-Bum [3 ]
Seok, Hae-Jun [4 ]
Seo, Hyeong-Jin [4 ]
Kim, Han-Ki [4 ]
机构：
[1] Korea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
[2] SNTEK, 906 Hakun Li, Kimpo Si 415843, Gyeonggi Do, South Korea
[3] Dongguk Univ, Div Phys & Semicond Sci, Seoul 100715, South Korea
[4] Sungkyunkwan Univ, Sch Adv Mat Sci & Engn, 2066 Seobu Ro, Suwon 440746, Gyeonggi Do, South Korea
来源：
APPLIED SURFACE SCIENCE | 2018年 / 440卷
关键词：
Sn-doped In2O3; Thickness; Cylindrical rotating magnetron sputtering; Preferred orientation; Transparent conducting electrodes; ORGANIC SOLAR-CELLS; INDIUM OXIDE-FILMS; THIN-FILMS; REACTIVE MAGNETRON; TEXTURE FORMATION; DEPOSITION; TRANSPARENT; TEMPERATURE; LAYER; ORIENTATION;
D O I：
10.1016/j.apsusc.2018.01.318
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
We report the characteristics of Sn-doped In2O3 (ITO) films intended for use as transparent conducting electrodes; the films were prepared via a five-generation, in-line type, cylindrical, rotating magnetron sputtering (CRMS) system as a function of film thickness. By using a rotating cylindrical ITO target with high usage (similar to 80%), we prepared high conductivity, transparent ITO films on five-generation size glass. The effects of film thickness on the electrical, optical, morphological, and structural properties of CRMS-grown ITO films are investigated in detail to correlate the thickness and performance of ITO films. The preferred orientation changed from the (222) to the (400) plane with increasing thickness of ITO is attributed to the stability of the (400) plane against resputtering during the CRMS process. Based on X-ray diffraction, surface field emission scanning electron microscopy, and cross-sectional transmission electron microscopy, we suggest a possible mechanism to explain the preferred orientation and effects of film thickness on the performance of CRMS-grown ITO films. (C) 2018 Elsevier B.V. All rights reserved.
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收藏
页码：1211 / 1218
页数：8
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