Fabrication of optical film derived from biomass using eco-friendly nanoimprint lithography

被引:1
|
作者
Takei, Satoshi [1 ,2 ]
Murakami, Gaku [3 ]
Mori, Yuto [1 ]
Ichikawa, Takumi [1 ]
Sekiguchi, Atsushi [1 ]
Obata, Tsutomu
Yokoyama, Yoshiyuki
Mizuno, Wataru
Sumioka, Junji
Horita, Yuji [3 ]
机构
[1] Toyama Prefectural Univ, Imizu, Toyama 9390398, Japan
[2] Osaka Univ, Toyonaka, Osaka 560, Japan
[3] Osaka Univ, Toyama 9390592, Japan
来源
ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXX | 2013年 / 8682卷
关键词
nanoimprint lithography; resist material; biomass; replica template;
D O I
10.1117/12.2010645
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents the chemical design and fabrication of optical film derived from biomass using eco-friendly nanoimprint lithography. The optical film derived from biomass with subwavelength structures was successfully demonstrated in specific desired properties. The linearly polymerized polysaccharide in optical film derived from biomass indicated two effects of high concentration of acrylate group in the side-chain terminus for highly sensitivity, and the ring components containing bulky disaccharide for suitable optical properties. The optical film derived from biomass is applicable to future development of antireflective material with subwavelength structures and suitable refractive index material as a chemical design concept.
引用
收藏
页数:9
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