Measurements of electron temperature, electron density, and neutral density in a radio-frequency inductively coupled plasma

Electron temperature, electron density, and neutral atom density were measured in a radio-frequency (rf) inductively coupled plasma using Thomson and Rayleigh scattering of laser radiation. Measurements were made in an argon discharge for pressures from 1 to 20 m Torr and input rf powers from 100 to 500 W. Spatial distribution profiles were measured for discharges with different aspect ratios. Electron temperature was found to depend on pressure but only weakly on power. Electron density depended strongly on both pressure and power. The neutral density was found to be significantly depleted in the plasma center and this depletion was attributed to heating of the neutrals by charged particle collisions. These results were compared to a simple model of inductively coupled plasmas. (C) 1996 American Vacuum Society.