Micro phenomena in low contact-force probing on aluminum

被引：2
作者：
Kataoka, K [1 ]
Itoh, T [1 ]
Suga, T [1 ]
机构：
[1] Tokyo Electron AT Ltd, TMS Dev Dept, Nirasaki City, Yamanashi, Japan
来源：
PROCEEDINGS OF THE FIFTY-FIRST IEEE HOLM CONFERENCE ON ELECTRICAL CONTACTS | 2005年
关键词：
aluminum; low-force contact; fritting; silver; LSI probing;
D O I：
10.1109/HOLM.2005.1518253
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Electric contact phenomena in probing of aluminum electrode under low contact force have been investigated. Metallic materials of wide variety were tested to find one suitable for low contact-force probing on aluminum using fritting. In order to investigate the low-force contact phenomena, a new measurement apparatus was developed to enable the control of contact force less than 1 mN, and direct observation of the probe tip during the repeated contact measurement. Silver, gold and platinum were found to be suitable materials for probes for fritting contact, and good electric contacts more than 1,000 counts were obtained. The tip of the probe was observed by an optical microscope and adhesion of the aluminum electrode was investigated.
引用
收藏
页码：259 / 264
页数：6
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