The surface morphology of Ba0.65Sr0.35TiO3 thin film by sol-gel method

被引：1
作者：
Hu, WC [1 ]
Yang, CR [1 ]
Zhang, WL [1 ]
Qiu, Y [1 ]
Zhu, L [1 ]
机构：
[1] Univ Elect Sci & Technol China, Coll Micro Elect & Solid Elect, Chengdu 610054, Peoples R China
来源：
INTEGRATED FERROELECTRICS | 2005年 / 72卷
关键词：
BST films; sol-gel; AFM; XPS; surface roughness;
D O I：
10.1080/10584580500311539
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Thin films of barium strontium titanate, Ba0.65Sr0.35TiO3, (BST), were deposited on Pt/Ti/SiO2/Si substrates with approximately 300 nm thickness by sol-gel method. Qualitative film analysis was performed with atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS) and transmission electron microscopy TEM. AFM indicated that surface roughness of the film increases with the concentrations of precursor solutions and that the BST thin films fabricated by low concentrations precursor solutions were characterized by a small surface roughness with a crack-free uniform microstructure. Farther more, the dielectric properties of BST films were measured.
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页码：1 / 11
页数：11
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