Length and refractive index measurement by Fourier transform interferometry and frequency comb spectroscopy

被引:57
|
作者
Balling, Petr [1 ]
Masika, Pavel [1 ]
Kren, Petr [1 ]
Dolezal, Miroslav [1 ]
机构
[1] Czech Metrol Inst, Prague 5, Czech Republic
关键词
interferometry; white light; gauge block; non-contact measurement; femtosecond frequency comb interferometry; length and distance measurement; refractive index; dispersion; Fourier transform spectroscopy; DISTANCE MEASUREMENT; STABILIZED LASER; AIR; MODE; CALIBRATION;
D O I
10.1088/0957-0233/23/9/094001
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper we describe the progress we have made in our simultaneous length measurement and the femtosecond comb interferometric spectroscopy in a conventional arrangement with a moving mirror. Scanning and detection over an interval longer than the distance between two consecutive pulses of the frequency comb allow for a spectral resolution of the individual frequency modes of the comb. Precise knowledge of comb mode frequency leads to a precise estimation of the spectral characteristics of inspected phenomena. Using the pulse train of the frequency comb allows for measurement with highly unbalanced lengths of interferometer arms, i.e. an absolute long distance measurement. Further, we present a non-contact (double sided) method of measurement of the length/thickness of plane-parallel objects (gauge blocks, glass samples) by combining the fs comb (white light) with single frequency laser interferometry. The position of a fringe packet is evaluated by estimating the stationary phase position for any wavelength in the spectral band used. The repeatability of this position estimation is a few nanometres regardless of whether dispersion of the arms is compensated (transform limited fringe packet similar to 10 fringes FWHM) or highly different (fringe packet stretched to >200 fringes FWHM). The measurement of steel gauge block by this method was compared with the standard method, and deviation (+13 +/- 12) nm for gauge blocks (2 to 100) mm was found. The measurement of low reflecting ceramic gauges or clear glass samples was also tested. In the case of glass, it becomes possible to measure simultaneously both the thickness and the refractive index (and dispersion) of flat samples.
引用
收藏
页数:13
相关论文
共 50 条
  • [41] Multiple-pulse-train-interference-based measurement of refractive index of air using femtosecond optical frequency comb
    Wei, Dong
    Takamasu, Kiyoshi
    Matsumoto, Hirokazu
    OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS II, 2012, 8563
  • [42] Self-mixing interferometry for distance and displacement measurement by Fourier transform method
    Wang, M
    Sato, T
    Lai, GM
    Shinohara, S
    LASER DIODES AND LEDS IN INDUSTRIAL, MEASUREMENT, IMAGING, AND SENSORS APPLICATIONS II; TESTING, PACKAGING AND RELIABILITY OF SEMICONDUCTOR LASERS V, 2000, 3945 : 193 - 200
  • [43] Simultaneous Measurement of Refractive Index and Thickness by Low Coherence Interferometry Considering Chromatic Dispersion of Index
    Hideki Maruyama
    Teruki Mitsuyama
    Masato Ohmi
    Masamitsu Haruna
    Optical Review, 2000, 7 : 468 - 472
  • [44] Simultaneous measurement of refractive index and thickness by low coherence interferometry considering chromatic dispersion of index
    Maruyama, H
    Mitsuyama, T
    Ohmi, M
    Haruna, M
    OPTICAL REVIEW, 2000, 7 (05) : 468 - 472
  • [45] Absolute distance measurement based on femtosecond frequency comb with wavelet transform
    Li, Yao
    Hu, Kun
    Ji, Rongyi
    Liu, Deming
    Zhou, Weihu
    OPTICAL ENGINEERING, 2014, 53 (12)
  • [46] Simultaneous measurement of refractive index and thickness of transparent plates by low coherence interferometry
    Ohmi, M
    Shiraishi, T
    Tajiri, H
    Haruna, M
    OPTICAL REVIEW, 1997, 4 (04) : 507 - 515
  • [47] Frequency domain interferometry for measuring ultrafast refractive index modulation and surface deformation
    Tamming, Ronnie R.
    Hodgkiss, Justin M.
    Chen, Kai
    ADVANCES IN PHYSICS-X, 2022, 7 (01):
  • [48] Measurement of refractive index change by surface plasmon resonance and phase quadrature interferometry
    Lee, Ju-Yi
    Shih, Hsueh-Ching
    Hong, Cyun-Tai
    Chou, Teng Ko
    OPTICS COMMUNICATIONS, 2007, 276 (02) : 283 - 287
  • [49] Corneal group refractive index measurement using low-coherence interferometry
    Uhlhorn, SR
    Manns, F
    Tahi, H
    Rol, P
    Parel, JM
    OPHTHALMIC TECHNOLOGIES VIII, PROCEEDINGS OF, 1998, 3246 : 14 - 21
  • [50] Detecting small variation rate of refractive index based on OAM interferometry and time-frequency analysis
    Wu, Shuimei
    Ma, Fenghua
    Wang, Anting
    OPTICS AND LASER TECHNOLOGY, 2024, 174