Length and refractive index measurement by Fourier transform interferometry and frequency comb spectroscopy

被引:57
|
作者
Balling, Petr [1 ]
Masika, Pavel [1 ]
Kren, Petr [1 ]
Dolezal, Miroslav [1 ]
机构
[1] Czech Metrol Inst, Prague 5, Czech Republic
关键词
interferometry; white light; gauge block; non-contact measurement; femtosecond frequency comb interferometry; length and distance measurement; refractive index; dispersion; Fourier transform spectroscopy; DISTANCE MEASUREMENT; STABILIZED LASER; AIR; MODE; CALIBRATION;
D O I
10.1088/0957-0233/23/9/094001
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper we describe the progress we have made in our simultaneous length measurement and the femtosecond comb interferometric spectroscopy in a conventional arrangement with a moving mirror. Scanning and detection over an interval longer than the distance between two consecutive pulses of the frequency comb allow for a spectral resolution of the individual frequency modes of the comb. Precise knowledge of comb mode frequency leads to a precise estimation of the spectral characteristics of inspected phenomena. Using the pulse train of the frequency comb allows for measurement with highly unbalanced lengths of interferometer arms, i.e. an absolute long distance measurement. Further, we present a non-contact (double sided) method of measurement of the length/thickness of plane-parallel objects (gauge blocks, glass samples) by combining the fs comb (white light) with single frequency laser interferometry. The position of a fringe packet is evaluated by estimating the stationary phase position for any wavelength in the spectral band used. The repeatability of this position estimation is a few nanometres regardless of whether dispersion of the arms is compensated (transform limited fringe packet similar to 10 fringes FWHM) or highly different (fringe packet stretched to >200 fringes FWHM). The measurement of steel gauge block by this method was compared with the standard method, and deviation (+13 +/- 12) nm for gauge blocks (2 to 100) mm was found. The measurement of low reflecting ceramic gauges or clear glass samples was also tested. In the case of glass, it becomes possible to measure simultaneously both the thickness and the refractive index (and dispersion) of flat samples.
引用
收藏
页数:13
相关论文
共 50 条
  • [31] Spectrally Resolved White Light Interferometry for NaCl Aqueous Solutions Refractive Index Measurement
    Likhachev, Igor G.
    Pustovoy, Vladimir, I
    Usievich, Boris A.
    FRONTIERS IN PHYSICS, 2021, 9
  • [32] Thickness and refractive index measurement of a silicon wafer based on an optical comb
    Jin, Jonghan
    Kim, Jae Wan
    Kang, Chu-Shik
    Kim, Jong-Ahn
    Eom, Tae Bong
    OPTICS EXPRESS, 2010, 18 (17): : 18339 - 18346
  • [33] Precision spectroscopy of non-thermal molecular plasmas using mid-infrared optical frequency comb Fourier transform spectroscopy
    Sadiek, Ibrahim
    Puth, Alexander
    Kowzan, Grzegorz
    Nishiyama, Akiko
    Klose, Sarah-Johanna
    Roepcke, Juergen
    Lang, Norbert
    Maslowski, Piotr
    van Helden, Jean-Pierre H.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2024, 33 (07)
  • [34] Synthetic wavelength interferometry of an optical frequency comb for absolute distance measurement
    Wu, Guanhao
    Liao, Lei
    Xiong, Shilin
    Li, Guoyuan
    Cai, Zhijian
    Zhu, Zebin
    SCIENTIFIC REPORTS, 2018, 8
  • [35] Nonlinear chirped interferometry for frequency-shift measurement and χ(3) spectroscopy
    Neradovskaia, E.
    Maingot, B.
    Cheriaux, G.
    Claudet, C.
    Forget, N.
    Jullien, A.
    APL PHOTONICS, 2022, 7 (11)
  • [36] Thin Film Thickness and Refractive Index Measurement by Multiple Beam Interferometry
    Chen, T. Y.
    Lin, Y. J.
    Hu, S. G.
    Yang, S. L.
    Chung, J. C.
    FOURTH INTERNATIONAL CONFERENCE ON EXPERIMENTAL MECHANICS, 2010, 7522
  • [37] A Review of a Spectral Domain Interferometer with a Frequency Comb for Length Measurement
    Jang, Yoon-Soo
    Park, Jungjae
    Jin, Jonghan
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2024, 25 (03) : 659 - 674
  • [38] Measurement of Refractive Index of Liquids Using Length Standards Traceable to SI Unit
    Sanjid, M. Arif
    Chaudhary, K. P.
    MAPAN-JOURNAL OF METROLOGY SOCIETY OF INDIA, 2016, 31 (02): : 89 - 95
  • [39] Linear refractive index measurement from visible to infrared region using common path interferometry
    Chang, Hao-Jung
    Munera, Natalia
    Keyser, Christian
    Webster, Scott
    Van Stryland, Eric W.
    Hagan, David J.
    2021 IEEE RESEARCH AND APPLICATIONS OF PHOTONICS IN DEFENSE CONFERENCE (RAPID), 2021,
  • [40] Single- and Double-Comb Tilted Fibre Bragg Grating Refractive Index Demodulation Methods with Fourier Transform Pre-Processing
    Cieszczyk, Slawomir
    Skorupski, Krzysztof
    Panas, Patryk
    SENSORS, 2022, 22 (06)