共 50 条
- [31] Semiconductor processing by plasma immersion ion implantation MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1998, 253 (1-2): : 258 - 268
- [34] Modification of metals by plasma immersion ion implantation SURFACE & COATINGS TECHNOLOGY, 2019, 365 : 83 - 93
- [35] Sheath dynamics in plasma immersion ion implantation PLASMA SOURCES SCIENCE & TECHNOLOGY, 1996, 5 (01): : 54 - 60
- [36] Plasma immersion ion implantation for silicon processing Annalen der Physik (Leipzig), 2001, 10 (04): : 279 - 298
- [39] Plasma immersion ion implantation of insulating materials SURFACE & COATINGS TECHNOLOGY, 2005, 196 (1-3): : 162 - 166
- [40] Sheath dynamics in plasma immersion ion implantation SURFACE & COATINGS TECHNOLOGY, 1996, 85 (1-2): : 98 - 104