Rear surface protection and front surface bi-layer passivation for silicon nanostructure-textured solar cells

被引:8
作者
Dou, Bingfei [1 ]
Jia, Rui [1 ]
Li, Haofeng [1 ]
Chen, Chen [1 ]
Ding, Wuchang [1 ]
Meng, Yanlong [1 ]
Liu, Xinyu [1 ]
Ye, Tianchun [1 ]
机构
[1] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
关键词
NANOWIRE ARRAYS; FABRICATION;
D O I
10.1088/0022-3727/46/2/025101
中图分类号
O59 [应用物理学];
学科分类号
摘要
Silicon nanostructure arrays were synthesized via Ag-catalysed chemical etching on solar cells. In contrast to the traditional etching in HF/AgNO3, the new technique used in this work produced nanostructure textures located only on the front surface of the cells. Furthermore, a SiO2/SiNX bi-layer was used to passivate the surface of the cells. By these optimizations, nanostructure-textured cells' performance was improved. The data obtained from this work are fundamental and has some reference value for future studies.
引用
收藏
页数:6
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