Thickness effect on the fracture and delamination of titanium films

被引:36
作者
Cordill, M. J. [1 ,2 ]
Taylor, A. A. [3 ,4 ]
机构
[1] Austrian Acad Sci, Erich Schmid Inst Mat Sci, A-8700 Leoben, Austria
[2] Univ Leoben, Dept Mat Phys, A-8700 Leoben, Austria
[3] Univ Durham, Dept Phys, Durham DH1 3LE, England
[4] Empa, Swiss Fed Labs Mat Testing & Res, Lab Mech & Nanostruct, CH-3602 Thun, Switzerland
关键词
Transmission electron microscopy; Fragmentation testing; Coating adhesion; Microstructure-property relationships; MECHANICAL-PROPERTIES; BRITTLE FILMS; ADHESION; POLYIMIDE; FRAGMENTATION; INTERFACE; SUBSTRATE; MODEL; XPS; TEM;
D O I
10.1016/j.tsf.2015.05.021
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Titanium adhesion layers are a common component of many coated products; they play a particularly important role in promoting the adhesion of Cu and Au conduction lines to polymer substrates for flexible electronic circuitry. In this work a full microstructural and mechanical characterization is performed on Ti layers of three different thicknesses-8, 12 and 50 nm-deposited onto polyimide. Observed differences in the mechanical behavior of the coatings were found to relate to the changing chemistry and grain size of the coatings. In particular, the observation, using transmission electron microscopy, that the two thinner coatings were comprised of 50% or less metallic Ti illustrates the potential pitfalls of altering something so simple as the coating thickness. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:209 / 214
页数:6
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