Formation of alumina fine particles by a magnetron sputtering-gas aggregation method

被引：18

作者：

Goto, M

Murakami, J

Tai, Y

Yoshimura, K

Igarashi, K

Tanemura, S

机构：

[1] National Industrial Research Institute of Nagoya, Kita-ku, Nagoya 462

来源：

ZEITSCHRIFT FUR PHYSIK D-ATOMS MOLECULES AND CLUSTERS | 1997年 / 40卷 / 1-4期

关键词：

D O I：

10.1007/s004600050172

中图分类号：

O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];

学科分类号：

070203 ; 070304 ; 081704 ; 1406 ;

摘要：

The alumina particles have been generated by a magnetron sputtering - gas aggregation method. The analyses of transmission electron microscope (TEM) images and electron diffraction patterns revealed some of the particles are tiny crystals of theta-alumina. The dependence of the particle size on the geometry and the temperature of the source exit has been studied.

引用

页码：115 / 118

页数：4

共 7 条

[1] FILLING OF MICRON-SIZED CONTACT HOLES WITH COPPER BY ENERGETIC CLUSTER-IMPACT [J].