Formation of alumina fine particles by a magnetron sputtering-gas aggregation method

被引：18
作者：
Goto, M
Murakami, J
Tai, Y
Yoshimura, K
Igarashi, K
Tanemura, S
机构：
[1] National Industrial Research Institute of Nagoya, Kita-ku, Nagoya 462
来源：
ZEITSCHRIFT FUR PHYSIK D-ATOMS MOLECULES AND CLUSTERS | 1997年 / 40卷 / 1-4期
关键词：
D O I：
10.1007/s004600050172
中图分类号：
O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号：
070203 ; 070304 ; 081704 ; 1406 ;
摘要：
The alumina particles have been generated by a magnetron sputtering - gas aggregation method. The analyses of transmission electron microscope (TEM) images and electron diffraction patterns revealed some of the particles are tiny crystals of theta-alumina. The dependence of the particle size on the geometry and the temperature of the source exit has been studied.
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页码：115 / 118
页数：4
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