Tribological study of a mono and multilayer coating of TaZrN/TaZr produced by magnetron sputtering on AISI-316L stainless steel

被引：21

作者：

Hernandez-Navarro, C. ^{[1
]}

Rivera, L. P. ^{[4
]}

Flores-Martinez, M. ^{[2
]}

Camps, E. ^{[3
]}

Muhl, S. ^{[4
]}

Garcia, E. ^{[5
]}

机构：

[1] Inst Tecnol Celaya, Tecno1 Nacl Mexico, Av Tecnol & Garcia Cubas, Guanajuato, Mexico

[2] Univ Guadalajara, CUCEI, Blvd Marcelino Garcia Barragan 1421,Ciudad Univ, Guadalajara 44430, Jalisco, Mexico

[3] Inst Nacl Invest Nucl, Apdo Postal 18-1027, Mexico City, DF, Mexico

[4] Univ Nacl Autonoma Mexico, Inst Invest Mat, Apartado Postal 70-360, Coyoacan, Mexico

[5] Univ Guadalajara, Catedras CONACYT, CUCEI, Blvd Marcelino Garcia Barragan 1421,Ciudad Univ, Guadalajara 44430, Jalisco, Mexico

来源：

TRIBOLOGY INTERNATIONAL | 2019年 / 131卷

关键词：

Ta/ZrN multilayer coatings; Wear; Magnetron sputtering; 316L stainless steel; TANTALUM-NITRIDE; MECHANICAL-PROPERTIES; THIN-FILMS; DEPOSITION; CATALYSTS; HARDNESS; MODULUS;

D O I：

10.1016/j.triboint.2018.10.034

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

Ternary nitride films (MXN) of transition metals (X) have been extensively investigated due to their high hardness, corrosion and wear resistance. Tantalum nitride (TaN) coatings offer the possibility of high thermal stability, hardness, and biocompatibility. It has been reported that the combination of transition metals such as Ti, Cr or Zr in the TaN matrix enhance the tribological properties of the coatings. This work presents the mechanical and tribological properties of the monolayer (TaZrN) and multilayer (TaZrN/TaZr/TaZrN) films deposited by reactive DC Magnetron co-Sputtering. The mono and multilayer films presented a combined structure of TaN and Ta phases. Both the mono and multilayer exhibited a columnar morphology with thicknesses greater than 1.5 mu m. The multilayer film had a hardness of 24 GPa whilst the hardness of the monolayer was 18 GPa for the 5 mN indenter load tests. The friction and wear rate were similar for both of the coating, however, the monolayer film had fractures and suffered film spallation. Raman spectroscopy studies of the debris and the zones with material accumulation in the wear tracks showed a band related to Tantalum Oxide (Ta2O5) at 650 cm(-1).

引用

页码：288 / 298

页数：11

共 41 条

[1] Electronic structure and mechanical properties of ternary ZrTaN alloys studied by ab initio calculations and thin-film growth experiments [J].

Abadias, G. ;

Kanoun, M. B. ;

Goumri-Said, S. ;

Koutsokeras, L. ;

Dub, S. N. ;

Djemia, Ph. .

PHYSICAL REVIEW B, 2014, 90 (14)

[2]

[Anonymous], 1999, G13305 ASTM INT

[3] Structural and mechanical properties of TaZrN films: Experimental and ab initio studies [J].

Aouadi, SM .

JOURNAL OF APPLIED PHYSICS, 2006, 99 (05)

[4] Characterization of tantalum zirconium nitride sputter-deposited nanocrystalline coatings [J].

Aouadi, SM ;

Filip, P ;

Debessai, M .

SURFACE & COATINGS TECHNOLOGY, 2004, 187 (2-3) :177-184

[5]

ASTM, 2010, C162405 ASTM INT

[6]

BLANPAIN B, 1993, TRIBOLOGY S, V25, P623, DOI 10.1016/S0167-8922(08)70415-2

[7] An overview of the potential of quantitative coating adhesion measurement by scratch [J].

Bull, SJ ;

Berasetegui, EG .

TRIBOLOGY INTERNATIONAL, 2006, 39 (02) :99-114

[8] Multilayer coatings for improved performance [J].

Bull, SJ ;

Jones, AM .

SURFACE & COATINGS TECHNOLOGY, 1996, 78 (1-3) :173-184

[9] Failure mode maps in the thin film scratch adhesion test [J].

Bull, SJ .

TRIBOLOGY INTERNATIONAL, 1997, 30 (07) :491-498

[10] On the factors affecting the critical indenter penetration for measurement of coating hardness [J].

Chen, J. ;

Bull, S. J. .

VACUUM, 2009, 83 (06) :911-920

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