Influence of consumed power on structural and nano-mechanical properties of nano-structured diamond-like carbon thin films

被引：23
|
作者：
Dwivedi, Neeraj [1 ,2 ]
Kumar, Sushil [1 ]
Rawal, Ishpal [1 ]
Malik, Hitendra K. [2 ]
机构：
[1] CSIR, Natl Phys Lab, Plasma Proc Mat Grp, New Delhi 110012, India
[2] Indian Inst Technol, Dept Phys, New Delhi 110016, India
来源：
APPLIED SURFACE SCIENCE | 2014年 / 300卷
关键词：
Plasma deposition; VI probe; XPS; Nanoindentation; DLC; SUBSTRATE BIAS; PLASMA; FIELD; DLC; DISSIPATION; DEPOSITION; XPS; GROWTH; RAMAN; PRESSURE;
D O I：
10.1016/j.apsusc.2014.02.023
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Mixed Ar-C2H2 plasma was characterized by VI probe for estimating the actual consumed power (CP) in the plasma and its effect on diamond-like carbon (DLC) thin films deposited at different CPs in the range 1685 W. The structural properties of the films were examined using variety of spectroscopic and microscopic techniques, such as Fourier Transform Infrared spectroscopy, X-ray Photoelectron Spectroscopy, Micro-Raman Spectroscopy and Atomic Force Microscopy. The film deposited at 36 W CP showed the formation of nano-structure, creation of optimum sp(3)/sp(2) bonding ratio and excellent nano-mechanical properties with the maximum hardness of similar to 28.2 GPa. However, the nano-mechanical properties of the films got altered with the variation of CP, which is attributed to the changes seen in the structural properties. These findings show that high quality DLC films with higher hardness can be deposited by monitoring and controlling the process parameters of the plasma. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码：141 / 148
页数：8
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