High Voltage Glow Discharge Electron Guns And Its Advanced Application Examples In Electronic Industry

被引：0

作者：

Denbnovetsky, S. V. ^{[1
]}

Melnyk, I. V. ^{[1
]}

Melnyk, V. G. ^{[1
]}

Tugai, A. ^{[1
]}

Tuhai, S. B. ^{[1
]}

机构：

[1] Natl Tech Univ Ukraine KPI, Elect Fac, Elect Devices Dept, Kiev, Ukraine

来源：

2016 INTERNATIONAL CONFERENCE RADIO ELECTRONICS & INFO COMMUNICATIONS (UKRMICO) | 2016年

关键词：

Electron Guns; Electron Beam; High Voltage Glow Discharge; Electron Beam Welding; Electron Beam Evaporation;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper is devoted to examples of some up-to-date and advanced possibilities of using of high voltage glow discharge electron beam guns for realising of different technological operations in electronic industry.

引用

页数：4

共 11 条

[1] [Anonymous], 1987, PHYS GAS DISCHARGE
[2] Model of beam formation in a glow discharge electron gun with a cold cathode
Denbnovetsky, SV
Felba, J
Melnik, VI
Melnik, IV
[J]. APPLIED SURFACE SCIENCE, 1997, 111 : 288 - 294
[3] Denbnovetsky SV, 1998, P INT SYMP DISCH EL, V18, P637, DOI 10.1109/DEIV.1998.738827
[4] Feinaeugle P., 2011, 54 ANN TECHN C P CHI, P202
[5] Mattausch G., 2014, ELEKTROTECHNICA ELEC, V49, P183
[6] Melnik I.V., 2012, RADIOELECTRONICS COM, V55, P50
[7] Melnyk I.V., 2013, RADIOELECTRONICS COM, V56, P51
[8] Novikov A.A., 1983, HIGH VOLTAGE GLOW DI
[9] Tuhai S.B., 2012, ELECTR COMMUN, V66, P9
[10] ULIANOV NK, 1978, TEPLOFIZ VYS TEMP, V16, P1121

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